PhableR 100 Displacement Talbot Lithography System
Displacement Talbot lithography with a guaranteed 150 nm half-pitch. Shown installed and operating in our Class 6 cleanroom.
Overview
A photolithography system that reaches the resolution of a stepper with the simplicity of a mask aligner. Displacement Talbot Lithography (DTL) prints sub-micron periodic structures with a guaranteed 150 nm half-pitch, and its large depth of focus allows printing across bowed and warped wafers. The system also supports proximity and contact exposures of micron-scale structures in the manner of a conventional mask aligner.
The system was installed in 2016 and remains fully functional with no known faults. In 2018 the piezo Z-scan was replaced with a longer-travel scan stage. It is currently installed and operating in a Class 6 cleanroom facility, and the photographs on this page show the actual unit in place.
The vibration isolation table shown in the photographs is sold separately and is not included. The system does not require that specific table, but it must be supported on a rigid platform and operated in a cleanroom.
Key Features
- Displacement Talbot Lithography with guaranteed 150 nm half-pitch
- Large depth of focus — prints over bowed and warped wafers
- Proximity and contact exposure modes for micron-scale structures
- Overlay alignment with X, Y and Theta micrometers
- Touch-panel control with beam intensity setting, interlock and key switch
- Piezo Z-scan upgraded to a longer-travel scan stage in 2018
Technical Specifications
| Printing capability | DTL, guaranteed 150 nm half-pitch |
|---|---|
| Exposure modes | DTL, proximity, contact |
| Beam size | 105 mm diameter |
| Beam uniformity | ±3% |
| Lateral motion | X-Y ±5 mm, Theta ±3.5° |
| Mask | Top-loaded 5-inch square, insert supplied |
| Substrate | Vacuum chuck for 4-inch round and smaller |
| Dimensions | 787.4 × 653.0 × 1344.0 mm |
| Weight | Approximately 90 kg |
| Electrical supply | 220–240 V 50 Hz or 110 V 60 Hz, single phase |
| Vacuum | 10 mbar, ¼-inch quick connect |
| Clean dry air | 4–5 bar, ¼-inch quick connect |
| Installation requirement | Rigid platform, cleanroom operation |
| Condition | Pre-owned — fully functional |
| Year | 2016 |
| Location | New Jersey, USA |
| Warranty | Sold as-is. No warranty is offered or implied. |
Included With Equipment
- PhableR 100 system with touch-panel control
- Nine-square starter phase mask set
- Mask insert for top-loaded 5-inch square masks
- Vacuum chuck for 4-inch round and smaller substrates
- Wedge error compensation levelling system
Interested in This Equipment?
Contact us to confirm availability, request additional technical information, or discuss purchasing, shipping, installation, or payment arrangements.